Nanocrystalline high-entropy alloy (CoCrFeNiAl0.3) thin-film coating by magnetron sputtering

THIN SOLID FILMS

卷:638

Article

Liao, Weibing^1,2,3  Lan, Si^4,5  Gao, Libo^1,2  Zhang, Hongti^1,2  Xu, Shang^1,2  Song, Jian²  Wang, Xunli⁴  Lu, Yang^1,2 

[1] City Univ Hong Kong, Ctr Adv Struct Mat, Shenzhen Res Inst, Shenzhen, Peoples R China

[2] City Univ Hong Kong, Dept Mech & Biomed Engn, Hong Kong, Hong Kong, Peoples R China

[3] Shenzhen Univ, Coll Phys & Energy, Shenzhen 518060, Peoples R China

[4] City Univ Hong Kong, Dept Phys & Mat Sci, Hong Kong, Hong Kong, Peoples R China

[5] Nanjing Univ Sci & Technol, Herbert Gleiter Inst Nanosci, Nanjing, Jiangsu, Peoples R China

关键词: High-entropy alloy;    Nanocrystalline;    Thin film coating;    Synchrotron X-ray scattering;    Mechanical properties;   

DOI  :  10.1016/j.tsf.2017.08.006

来源: Elsevier

【 摘 要 】

High-entropy CoCrFeNiAl0.3 alloy thin films were prepared by magnetron sputtering technique. The thin film surface was very smooth and homogeneous. The synchrotron X-ray experiment confirmed that (111) type of texture existed in the thin film, and the structure was face-centered cubic nanocrystals with a minor content of ordered NiAl-type body-centered cubic structures. Interestingly, the elastic modulus of the thin film was nearly the same to the bulk single-crystal counterpart, however, the nanohardness is about four times of the bulk single crystal counterpart. It was found that the high hardness was due to the formation of nanocrystal structure inside the thin films and the preferred growth orientation, which could be promising for applications in micro fabrication and advanced coating technologies. (C) 2017 Elsevier B.V. All rights reserved.

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