Magnetron sputtered Hf-B-Si-C-N films with controlled electrical conductivity and optical transparency, and with ultrahigh oxidation resistance

THIN SOLID FILMS

卷:653

Article

Simova, Veronika^1,2  Vlcek, Jaroslav^1,2  Zuzjakova, Sarka^1,2  Houska, Jiri^1,2  Shen, Yi³  Jiang, Jiechao³  Meletis, Efstathios I.³  Perina, Vratislav⁴ 

[1] Univ West Bohemia, Dept Phys, Univ 8, Plzen 30614, Czech Republic

[2] Univ West Bohemia, NTIS European Ctr Excellence, Univ 8, Plzen 30614, Czech Republic

[3] Univ Texas Arlington, Dept Mat Sci & Engn, Arlington, TX 76019 USA

[4] Acad Sci Czech Republ, Nucl Phys Inst, Rez Near Prague 25068, Czech Republic

关键词: Hf-B-Si-C-N films;    Pulsed reactive magnetron sputtering;    Electrical conductivity;    Optical transparency;    High-temperature oxidation resistance;   

DOI  :  10.1016/j.tsf.2018.03.064

来源: Elsevier

【 摘 要 】

The paper deals with Hf-B-Si-C-N films deposited onto Si and SiC substrates using pulsed magnetron cosputtering of a single B4C-Hf-Si target (at fixed 15% Hf and 20% Si fractions in the target erosion area) in argon-nitrogen gas mixtures. We focus on the effect of the nitrogen fraction in the gas mixture (in the range from 0% to 50%) and of the voltage pulse length (50 mu s and 85 mu s with the corresponding duty cycle of 50% and 85%, respectively) on the structure and properties of the films. We show that an increasing nitrogen fraction in the gas mixture and consequently in the films (up to 52 at.%) results in a strong amorphization of the film structure, decrease in the film hardness, and rapid rise in the electrical resistivity and the optical transparency of the films. Very high oxidation resistance in air even up to 1500 degrees C is demonstrated for two sufficiently hard (20-22 GPa) Hf-B-Si-C-N films: the electrically conductive Hf7B23Si22C6N40 film and the optically transparent Hf6B21Si19C4N47 film, both with a contamination level < 3 at.%. The results are important for designing hightemperature protective coatings of electronic and optical elements, and sensors for severe oxidation environments.

【 授权许可】

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