Deposition of zirconium oxide using atmospheric pressure plasma enhanced chemical vapor deposition with various precursors

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卷:733

Article

Patel, Dhruval¹  Bonova, Lucia^1,2  Jeckell, Zachary¹  Barlaz, D. Eitan¹  Chaudhuri, Santanu³  Krogstad, Daniel, V⁴  Ruzic, David N.¹ 

[1] Univ Illinois, Nucl Plasma Radiol Engn, 104 South Wright St, Urbana, IL 61801 USA

[2] Slovak Univ Technol Bratislava, Adv Technol Res Inst, Jana Bottu 25, Trnava 91724, Slovakia

[3] Univ Illinois, Civil Mat & Environm Engn, Engn Res Facil 2095, 842 W Taylor St, Chicago, IL 60607 USA

[4] Appl Res Inst, 2100 S Oak St, Champaign, IL 61820 USA

关键词: Atmospheric pressure plasma;    Zirconia;    Liquid assisted plasma enhanced chemical vapor deposition;    Zirconium oxynitrate hydrate;    Zirconium tert-butoxide;    Zirconium acetylacetonate;   

DOI  :  10.1016/j.tsf.2021.138815

来源: Elsevier

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