A comparison of reactive plasma pre-treatments on PET substrates by Cu and Ti pulsed-DC and HIPIMS discharges

THIN SOLID FILMS

卷:520

Article

Audronis, M.¹  Hinder, S. J.²  Mack, P.³  Bellido-Gonzalez, V.¹  Bussey, D.⁴  Matthews, A.⁴  Baker, M. A.² 

[1] Gencoa Ltd, Liverpool L24 9HP, Merseyside, England

[2] Univ Surrey, Fac Engn & Phys Sci, Surface Anal Lab, Guildford GU2 7XH, Surrey, England

[3] ThermoFisher Sci Ltd, E Grinstead RH19 1UB, Sussex, England

[4] Univ Sheffield, Dept Engn Mat, Sheffield S1 3JD, S Yorkshire, England

关键词: Polyethylene terephthalate (PET);    Plasma pre-treatment;    XPS;    Contact angle;    HIPIMS;    Vacuum web coating;   

DOI  :  10.1016/j.tsf.2011.09.011

来源: Elsevier

【 摘 要 】

PET web samples have been treated by magnetically enhanced glow discharges powered using either medium frequency pulse direct current (p-DC) or low frequency high power pulse (HIPIMS) sources. The plasma pretreatment processes were carried out in an Ar-O(2) atmosphere using either Cu or Ti sputter targets. XPS, AFM and sessile drop water contact angle measurements have been employed to examine changes in surface chemistry and morphology for different pre-treatment process parameters. Deposition of metal oxide onto the PET surface is observed as a result of the sputter magnetron-based glow discharge web treatment. Using the Cu target, both the p-DC and HIPIMS processes result in the formation of a thin CuO layer (with a thickness between 1 and 11 nm) being deposited onto the PET surface. Employing the Ti target, both p-DC and HIPIMS processes give rise to a much lower concentration of Ti (<5 at.%), in the form of TiO(2) on the PET treated surface. The TiO(2) is probably distributed as an island-like distribution covering the PET surface. Presence of Cu and Ti oxide constituents on the treated PET is beneficial in aiding the adhesion but alone (i.e. without oxygen plasma activation) is not enough to provide very high levels of hydrophilicity as is clear from sessile drop water contact angle measurements on aged samples. Exposure to the plasma treatments leads to a small amount of roughening of the substrate surface, but the average surface roughness in all cases is below 2.5 nm. The PET structure at the inter-face with a coating is mostly or wholly preserved. The oxygen plasma treatment, metal oxide deposition and surface roughening resulting from the HIPIMS and p-DC treatments will promote adhesion to any subsequent thin film that is deposited immediately following the plasma treatment. (C) 2011 Elsevier B.V. All rights reserved.

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