Ceramic thin film thermocouples for SiC-based ceramic matrix composites

THIN SOLID FILMS

卷:520

Article

Wrbanek, John D.¹  Fralick, Gustave C.¹  Zhu, Dongming¹ 

[1] NASA, Glenn Res Ctr, Cleveland, OH 44135 USA

关键词: Thermocouples;    Thin films;    Indium oxides;    Zinc oxides;    Ceramic matrix composites;    High temperature environments;   

DOI  :  10.1016/j.tsf.2012.04.034

来源: Elsevier

【 摘 要 】

Conductive ceramic thin film thermocouples were investigated for application to silicon carbide fiber reinforced silicon carbide ceramic matrix composite (SiC/SiC CMC) components. High temperature conductive oxides based on indium and zinc oxides were selected for testing to high temperatures in air. Sample oxide films were first sputtered-deposited on alumina substrates then on SiC/SiC CMC sample disks. Operational issues such as cold junction compensation to a 0 degrees C reference, resistivity and thermopower variations are discussed. Results show that zinc oxides have an extremely high resistance and thus increased complexity for use as a thermocouple, but thermocouples using indium oxides can achieve a strong, nearly linear response to high temperatures. Published by Elsevier B.V.

【 授权许可】

Free