Structure and chemical bonds in reactively sputtered black Ti-C-N-O thin films

THIN SOLID FILMS

卷:520

Article

Chappe, J. M.²  de Lucas, M. C. Marco¹  Cunha, L.²  Moura, C.³  Pierson, J. F.⁴  Imhoff, L.¹  Heintz, O.¹  Potin, V.¹  Bourgeois, S.¹  Vaz, F.² 

[1] Univ Bourgogne, CNRS, Lab Interdisciplinaire Carnot Bourgogne ICB, UMR 5209, F-21078 Dijon, France

[2] Univ Minho, Ctr Fis, P-4710057 Braga, Portugal

[3] Univ Minho, Dept Fis, P-4710057 Braga, Portugal

[4] Ecole Mines, Dept CP2S, Inst Jean Lamour, UMR 7198,CNRS, F-54042 Nancy, France

关键词: Titanium Oxy-Carbo-Nitrides;    Reactive Sputtering;    Transmission Electron Microscopy;    Raman Spectroscopy;    X-ray Photoelectron Spectroscopy;   

DOI  :  10.1016/j.tsf.2011.06.108

来源: Elsevier

【 摘 要 】

The evolution of the nanoscale structure and the chemical bonds formed in Ti-C-N-O films grown by reactive sputtering were studied as a function of the composition of the reactive atmosphere by increasing the partial pressure of an O-2+N-2 gas mixture from 0 up to 0.4 Pa, while that of acetylene (carbon source) was constant. The amorphisation of the films observed by transmission electron microscopy was confirmed by micro-Raman spectroscopy, but it was not the only effect associated to the increase of the O-2+N-2 partial pressure. The chemical environment of titanium and carbon, analysed by X-ray photoemission spectroscopy, also changes due to the higher affinity of Ti towards oxygen and nitrogen than to carbon. This gives rise to the appearance of amorphous carbon coexisting with poorly crystallized titanium oxynitride. The evolution of the films colour is explained on the basis of these structural changes. (C) 2011 Elsevier B.V. All rights reserved.

【 授权许可】

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