Adhesive-deformation relationships and mechanical properties of nc-AlCrN/a-SiNx hard coatings deposited at different bias voltages

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Article

Harsani, M.¹  Ghafoor, N.²  Calamba, K.²  Zackova, P.¹  Sahul, M.¹  Vopat, T.³  Satrapinskyy, L.⁴  Caplovicova, M.⁵  Caplovic, L.¹ 

[1] Slovak Univ Technol Bratislava, Fac Mat Sci & Technol, Inst Mat Sci, Jana Bottu 25, Trnava 91724, Slovakia

[2] Linkoping Univ, Dept Phys Chem & Biol, IFM, SE-58183 Linkoping, Sweden

[3] Slovak Univ Technol Bratislava, Fac Mat Sci & Technol, Inst Prod Technol, Jana Bottu 25, Trnava 91724, Slovakia

[4] Comenius Univ, Fac Math Phys & Informat, Bratislava 84248, Slovakia

[5] Slovak Univ Technol Bratislava, Univ Sci Pk Bratislava Ctr, STU Ctr Nanodiagnost, Vazovova 5, Bratislava 81243, Slovakia

关键词: Aluminum-chromium-silicon-nitride;    Hard coating;    Lateral rotating cathode;    Adhesion;    Deformation;    Hardness;    Transmission electron microscopy;   

DOI  :  10.1016/j.tsf.2018.02.006

来源: Elsevier

【 摘 要 】

A series of Al-Cr-Si-N hard coatings were deposited on WC-Co substrates with a negative substrate bias voltage ranging from -50 to -200 V using cathodic arc evaporation system. A Rockwell-C adhesion test demonstrated that excellent adhesion was observed at lower bias voltages of -50 V and -80 V, while further increases in bias voltage up to -200 V led to severe delamination and worsening of the overall adhesion strength. X-ray diffraction and transmission electron microscopy analysis revealed a single phase cubic B1-structure identified as an AlCrN solid solution with a nanocomposite microstructure where cubic AlCrN nanocrystals were embedded in a thin continuous amorphous SiNx matrix. Coatings exhibited a 002-texture evolution that was more pronounced at higher bias voltages (>=-120 V). Stress-induced cracks were observed inside the coatings at high bias voltages (>=-150 V), which resulted in stress relaxation and a decline in the overall residual stresses.

【 授权许可】

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