Accurate high-resolution depth profiling of magnetron sputtered transition metal alloy films containing light species: A multi-method approach

THIN SOLID FILMS

卷:686

Article

Moro, M., V¹  Holenak, R.^1,2  Medina, L. Zendejas³  Jansson, U.³  Primetzhofer, D.¹ 

[1] Uppsala Univ, Dept Phys & Astron, Box 516, S-75120 Uppsala, Sweden

[2] Brno Univ Technol, Dept Phys Engn, Brno 61669, Czech Republic

[3] Uppsala Univ, Dept Chem, Box 538, S-75120 Uppsala, Sweden

关键词: High-resolution;    Composition depth profiling;    Ion beam analysis;    Metal alloys;    Magnetron sputtered thin-films;   

DOI  :  10.1016/j.tsf.2019.137416

来源: Elsevier

【 摘 要 】

We present an assessment of a multi-method approach based on ion beam analysis to obtain high-resolution depth profiles of the total chemical composition of complex alloy systems. As a model system we employ an alloy based on several transition metals and containing light species. Samples have been investigated by a number of different ion-beam based techniques, i.e., Rutherford Backscattering Spectrometry, Particle-Induced X-ray Emission, Elastic Backscattering Spectrometry and Time-of-Flight/Energy Elastic Recoil Detection Analysis. Sets of spectra obtained from these different techniques were analyzed both independently and following an iterative and self-consistent approach yielding a more accurate depth profile of the sample, including both metallic heavy constituents (Cr, Fe and Ni) as well as the rather reactive light species (C, O) in the alloy. A quantitative comparison in terms of achievable precision and accuracy is made and the limitations of the single method approach are discussed for the different techniques. The multi-method approach is shown to yield significantly improved and accurate information on stoichiometry, depth distribution and thickness of the alloy with the improvements being decisive for a detailed correlation of composition to the material properties such as corrosion strength. The study also shows the increased relative importance of experimental statistics for the achievable accuracy in the multi-method approach.

【 授权许可】

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