Deposition of fine carbon particles using pulsed ArF laser ablation assisted by inductively coupled plasma

THIN SOLID FILMS

卷:374

Article; Proceedings Paper

Suda, Y ; Nishimura, T ; Ono, T ; Akazawa, M ; Sakai, Y ; Homma, N

关键词: laser ablation;    inductively coupled plasma (ICP);    particle growth;    ambient gas;    diamond like carbon (DLC);   

DOI  :  10.1016/S0040-6090(00)01167-6

来源: Elsevier

【 摘 要 】

Carbon thin films containing many fine carbon particles were deposited by a pulsed ArF laser ablation technique assisted by inductively coupled plasma (ICP). The sizes of the particles were found to be similar to 100 nm. The particles seemed to be coagulated from several finer particles of size similar to 10 nm. When ICP was applied to a plume, the shape of the coagulated particles became spherical. The deposited surface was assumed to be diamond-like carbon based on the binding energy of carbon (1s) in the particle obtained by XPS spectra. (C) 2000 Elsevier Science S.A. All rights reserved.

【 授权许可】

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