Studies of annealing impact on the morphological, opto-dielectric and mechanical behaviors of molybdenum-doped CrN coatings

THIN SOLID FILMS

卷:677

Article

Rahman, M. Mahbubur^1,2  Ibrahim, Khalil^1,3  Taha, Hatem⁴  Amri, Amun⁵  Zhao, Xiaoli⁶  Kabir, Humayun²  Moh, T. S. Y.⁷  Ahmed, Bouraire⁸  Zhou, Zhi-feng⁹  Azis, Rabaah Syahidah^10,11  Abul Hossain, Md²  Altarawneh, Mohammednoor^1,12  Jiang, Zhong-Tao¹ 

[1] Murdoch Univ, Sch Engn & Informat Technol, Surface Anal & Mat Engn Res Grp, Perth, WA 6150, Australia

[2] Jahangirnagar Univ, Dept Phys, Dhaka 1342, Bangladesh

[3] Al Furat Al Awsat Tech Univ, Karbala Tech Inst, Karbala 56001, Iraq

[4] Ibn Al Haitham Univ Baghdad, Coll Educ Pure Sci, Dept Phys, Baghdad 10071, Iraq

[5] Univ Riau, Dept Chem Engn, Pekanbaru, Indonesia

[6] Edith Cowan Univ, Sch Engn, Joondalup, WA 6027, Australia

[7] Univ Coll Technol Sarawak, Sch Engn & Technol, 868 Persiaran Brooke, Sibu 96000, Sarawak, Malaysia

[8] Al Furat Al Ausat Tech Univ, Dept Mech Engn, Najaf, Kufa, Iraq

[9] City Univ Hong Kong, Dept Mech & Biomed Engn, Kowloon, Hong Kong, Peoples R China

[10] Univ Putra Malaysia, Fac Sci, Dept Phys, Serdang 43400, Selangor, Malaysia

[11] Univ Putra Malaysia, Inst Adv Technol ITMA, MSCL, Serdang 43400, Selangor, Malaysia

[12] Al Hussein Bin Talal Univ, Chem Engn Dept, Maan, Jordan

关键词: Annealing temperature;    Molybdenum doped chromium nitride;    Thin film coatings;    Lattice constants;    Residual stress;    Solar absorptance;    Optical band-gap;    Hardness;   

DOI  :  10.1016/j.tsf.2019.03.016

来源: Elsevier

【 摘 要 】

In the present study, molybdenum doped chromium nitride coatings deposited onto silicon substrates via unbalanced magnetron sputtering, in as-deposited and annealed conditions, at 500-800 degrees C in steps of 100 degrees C, were studied to reveal their temperature dependent structural, morphological, optical and mechanical behaviors. An analysis of these features was carried out using X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), ultraviolet visible (UV-Vis) spectroscopy, nanoindentation and finite element modeling (FEM) techniques. XRD results exhibited a significant improvement in the crystallinity of the Molybdenum (Mo)doped chromium nitride (CrN) coatings along (111) and (200) diffraction planes, as the annealing temperatures increased. The lattice parameters gradually decreased from 4.20 to 4.12 angstrom as the temperature increased. The same tendency was also observed for lattice microstrains and residual stresses. Smooth grain-like surfaces were observed by FESEM imaging techniques. M an annealing temperature of 700 degrees C, the spectral absorptance of Mo:CrN films attained its peak value (86%), whereas the energy band-gaps were reduced from 2.48 to 1.14 eV. The other optical parameters such as complex dielectric constants, Urbach energy values, and steepness parameters of these coatings were also discussed. The hardness and elastic modulus of the as-deposited Mo:CrN films were estimated to be 18.4 and 287 GPa, respectively. At a film thickness of 1.0 mu m the highest stress of 20 GPa was evaluated, via FEM studies, at the interface between the film and the substrate. As the film thickness was enhanced, the stress level decreased. At higher annealing temperatures, both the mechanical hardness (H) and the elastic modulus (E) of Mo-doped CrN coatings dwindled.

【 授权许可】

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