Structural and microstructural analysis of bifunctional TiO2/Al-Zr thin film deposited by hybrid process

THIN SOLID FILMS

卷:709

Article

de Oliveira, Caroline Villardi^1,2  Migot, Sylvie³  Alhussein, Akram^1,2  Jimenez, Carmen⁴  Schuster, Frederic^2,5  Ghanbaja, Jaafar³  Sanchette, Frederic^1,2 

[1] Univ Technol Troyes, CNRS, ICD LASMIS, Pole Technol Sud, F-52800 Champagne, Nogent, France

[2] UTT, LRC CEA ICD LASMIS, NICCI, Pole Technol Sud, F-52800 Champagne, Nogent, France

[3] Univ Lorraine, UMR CNRS 7198, Inst Jean Lamour, F-54000 Nancy, France

[4] Univ Grenoble Alpes, CNRS, Grenoble INP, LMGP, F-38000 Grenoble, France

[5] CEA, Ctr Saclay, PTCMP, F-91191 Gif Sur Yvette, France

关键词: Aluminum-zirconium;    Titanium dioxide;    Thin film;    Magnetron sputtering;    Aerosol-assisted chemical vapor deposition;    Structure;   

DOI  :  10.1016/j.tsf.2020.138255

来源: Elsevier

【 摘 要 】

An Al-Zr (4 at.% Zr) film is deposited on High Speed Steel substrates by pulsed Direct Current magnetron sputtering in order to provide sacrificial corrosion resistance of steel. A TiO2 layer is synthesized on the top by aerosol-assisted metal-organic chemical Vapour Deposition (AA-MOCVD) in order to insure anti-biofouling behaviour. TiO2 coating has a typical CVD microstructure and the film is anatase single phased. The as-deposited Al-Zr film is an extended supersaturated solid solution Al(Zr) of Zr in Al. The AA-MOCVD process is performed at 773 K for 40 min. This annealing leads to a fine precipitation of highly coherent metastable Al3Zr(L1(2)) phase in the Al(Zr) matrix. Larger precipitates with a needle like morphology, which crystallize in the equilibrium tetragonal Al3Zr(D0(23)) phase are also observed. Transmission electron microscopy analysis clearly shows the cube on cube orientation between Al3Zr(L1(2)) phase and Al(Zr) matrix. As the cubic Al3Zr(L1(2)) metastable phase is beneficial for the mechanical properties of bulk aluminium based alloys, this result opens the investigation field on Al-Zr coatings, which can provide sacrificial protection of steels.

【 授权许可】

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