Improvement of the effective work function and transmittance of thick indium tin oxide/ultrathin ruthenium doped indium oxide bilayers as transparent conductive oxide

THIN SOLID FILMS

卷:598

Article

Taweesup, Kattareeya¹  Yamamoto, Ippei²  Chikyow, Toyohiro²  Lothongkum, Gobboon¹  Tsukagoshi, Kazutoshi²  Ohishi, Tomoji³  Tungasmita, Sukkaneste⁴  Visuttipitukul, Patama¹  Ito, Kazuhiro⁵  Takahashi, Makoto⁵  Nabatame, Toshihide^2,6 

[1] Chulalongkorn Univ, Fac Engn, Dept Met Engn, Bangkok 10330, Thailand

[2] Natl Inst Mat Sci NIMS, Int Ctr Mat Nanoarchitecton WTI MANA, Tsukuba, Ibaraki 3050044, Japan

[3] Shibaura Inst Technol, Koto Ku, Tokyo 1358548, Japan

[4] Chulalongkorn Univ, Dept Phys, Fac Sci, Bangkok 10330, Thailand

[5] Osaka Univ, Joining & Welding Res Inst, Ibaraki, Osaka 5670047, Japan

[6] Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, Japan

关键词: Ruthenium;    Doped indium oxide;    Transparent conductive oxide;    Effective work function;    Indium tin oxide;    Bilayers;   

DOI  :  10.1016/j.tsf.2015.11.070

来源: Elsevier

【 摘 要 】

Ruthenium doped indiumoxide (In1-xRuxOy) films fabricated using DC magnetron co-sputtering with In2O3 and Ru targets were investigated for use as transparent conductive oxides. The In1-xRuxOy films had an amorphous structure in the wide compositional range of x = 0.3-0.8 and had an extremely smooth surface. The transmittance and resistivity of the In1-xRuxOy films increased as the Ru content increased. The transmittance of the In0.38Ru0.62Oy film improved to over 80% when the film thickness was less than 5 nm, while the specific resistivity (rho) was kept to a low value of 1.6 x 10(-4) Omega cm. Based on these experimental data, we demonstrated that thick indium tin oxide (In0.9Sn0.1Oy, ITO) (150 nm)/ultrathin In0.38Ru0.62Oy (3 nm) bilayers have a high effective work function of 5.3 eV, transmittance of 86%, and low rho of 9.2 x 10(-5) Omega cm. This ITO/In0.38Ru0.62Oy bilayer is a candidate for use as an anode for organic electroluminescent devices. (C) 2015 Elsevier B.V. All rights reserved.

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