CFx thin solid films deposited by high power impulse magnetron sputtering: Synthesis and characterization

SURFACE & COATINGS TECHNOLOGY

卷:206

Article

Schmidt, S.¹  Greczynski, G.¹  Goyenola, C.¹  Gueorguiev, G. K.¹  Czigany, Zs²  Jensen, J.¹  Ivanov, I. G.³  Hultman, L.¹ 

[1] Linkoping Univ, Dept Phys IFM, Thin Film Phys Div, SE-58183 Linkoping, Sweden

[2] Hungarian Acad Sci, Res Inst Tech Phys & Mat Sci, H-1525 Budapest, Hungary

[3] Linkoping Univ, Dept Phys IFM, Semicond Mat Div, SE-58183 Linkoping, Sweden

关键词: Fluorine containing carbon thin films;    HiPIMS;    CFx;    First principle calculations;    XPS;    TEM;   

DOI  :  10.1016/j.surfcoat.2011.06.055

来源: Elsevier

【 摘 要 】

Fluorine containing amorphous carbon films (CFx, 0.16 <= x <= 0.35) have been synthesized by reactive high power impulse magnetron sputtering (HiPIMS) in an Ar/CF4 atmosphere. The fluorine content of the films was controlled by varying the CF4 partial pressure from 0 mPa to 110 mPa at a constant deposition pressure of 400 mPa and a substrate temperature of 110 degrees C. The films were characterized regarding their composition, chemical bonding and microstructure as well as mechanical properties by applying elastic recoil detection analysis, X-ray photoelectron spectroscopy, Raman spectroscopy, transmission electron microscopy, and nanoindentation. First-principles calculations were carried out to predict and explain F-containing carbon thin film synthesis and properties. By geometry optimizations and cohesive energy calculations the relative stability of precursor species including C-2, F-2 and radicals, resulting from dissociation of CF4, were established. Furthermore, structural defects, arising from the incorporation of F atoms in a graphene-like network, were evaluated. All as-deposited CFx films are amorphous. Results from X-ray photoelectron spectroscopy and Raman spectroscopy indicate a graphitic nature of CFx films with x <= 0.23 and a polymeric structure for films with x >= 0.26. Nanoindentation reveals hardnesses between similar to 1 GPa and similar to 16 GPa and an elastic recovery of up to 98%. (C) 2011 Elsevier B.V. All rights reserved.

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