Structure and properties of Cr-C/Ag films deposited by magnetron sputtering

SURFACE & COATINGS TECHNOLOGY

卷:281

Article

Folkenant, M.¹  Nygren, K.^1,2  Malinovskis, P.¹  Palisaitis, J.³  Persson, P. O. A.³  Lewin, E.¹  Jansson, U.¹ 

[1] Uppsala Univ, Dept Chem, Angstrom Lab, S-75721 Uppsala, Sweden

[2] Impact Coatings AB, SE-58216 Linkoping, Sweden

[3] Linkoping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Div, SE-58183 Linkoping, Sweden

关键词: Amorphous;    Chromium carbide;    Silver;    Magnetron sputtering;    Mechanical properties;    Electrical properties;   

DOI  :  10.1016/j.surfcoat.2015.09.054

来源: Elsevier

【 摘 要 】

Cr-C/Ag thin films with 0-14 at% Ag have been deposited by magnetron sputtering from elemental targets. The samples were analyzed by X-ray diffraction, transmission electron microscopy, X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM) to study their structure and chemical bonding. A complex nanocomposite structure consisting of three phases; nanocrystalline Ag, amorphous CrCx and amorphous carbon is reported. The carbon content in the amorphous carbide phase was determined to be 32-33 at% C, independent of Ag content Furthermore, SEM and XPS results showed higher amounts of Ag on the surface compared to the bulk. The hardness and Young's modulus were reduced from 12 to 8 GPa and from 270 to 170 GPa, respectively, with increasing Ag content. The contact resistance was found to decrease with Ag addition, with the most Ag rich sample approaching the values of an Ag reference sample. Initial tribological tests gave friction coefficients in the range of 0.3 to 0.5, with no clear trends. Annealing tests show that the material is stable after annealing at 500 degrees C for 1 h, but not after annealing at 800 degrees C for 1 h. In combination, these results suggest that sputtered Cr-C/Ag films could be potentially applicable for electric contact applications. (C) 2015 The Authors. Published by Elsevier B.V.

【 授权许可】

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