Modification of various properties of HfO2 thin films obtained by changing magnetron sputtering conditions

SURFACE & COATINGS TECHNOLOGY

卷:320

Article; Proceedings Paper

Mazur, Michal¹  Howind, Torsten²  Gibson, Des²  Kaczmarek, Danuta¹  Morgiel, Jerzy³  Wojcieszak, Damian¹  Zhu, Wenzhong²  Mazur, Piotr⁴ 

[1] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, Janiszewskiego 11-17, PL-50372 Wroclaw, Poland

[2] Univ West Scotland, Scottish Univ Phys Alliance, Inst Thin Films Sensors & Imaging, High St, Paisley PA1 2BE, Renfrew, Scotland

[3] Polish Acad Sci, Inst Met & Mat Sci, Reymonta 25, PL-30059 Cracov, Poland

[4] Univ Wroclaw, Inst Expt Phys, Max Born 9, PL-50204 Wroclaw, Poland

关键词: HfO2;    Thin films;    Magnetron sputtering;    Microstructure;    Optical properties;    Mechanical properties;   

DOI  :  10.1016/j.surfcoat.2016.12.001

来源: Elsevier

【 摘 要 】

In this work, properties of hafnium dioxide (HfO2) thin films deposited by magnetron sputtering with different powers (i.e. 200 W, 400 W and 600 W) were described. Based on microstructure measurements obtained by X-ray diffraction, Raman scattering and transmission electron microscopy method it was observed that there is a significant influence of the sputtering power on investigated properties of HfO2 thin films. Increase of the sputtering power caused, e.g. an increase of average crystallite size and surface roughness. Microstructure of thin films deposited with lower power was composed from a large number of voids that resulted in significant changes of their optical and mechanical properties. Results of optical studies showed that all deposited thin films were well transparent in a visible light range. Refractive index increased gradually with an increase of deposition power from 1.86 (200 W) to 2.09 (600 W). Performed investigations of mechanical properties revealed that hardness and Young's elastic modulus of HfO2 thin films increased with an increase of the sputtering power. (C) 2016 Elsevier B.V. All rights reserved.

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