Flexible PZT thin film transferred on polymer substrate

SURFACE & COATINGS TECHNOLOGY

卷:343

Article; Proceedings Paper

Dufay, Thibault¹  Guiffard, Benoit¹  Seveno, Raynald¹  Ginestar, Stephane¹  Thomas, Jean-Christophe² 

[1] Univ Nantes, Univ Bretagne Loire, IETR UMR CNRS 6164, Fac Sci & Tech, BP 92208,2 Rue Houssiniere, F-44322 Nantes 3, France

[2] Univ Nantes, Univ Bretagne Loire, GeM UMR CNRS 6183, Fac Sci & Tech, BP 92208,2 Rue Houssiniere, F-44322 Nantes 3, France

关键词: Flexible PZT;    Polymer substrate;    Transfer process;    Ferroelectric properties;   

DOI  :  10.1016/j.surfcoat.2017.09.080

来源: Elsevier

【 摘 要 】

Highly flexible lead zirconate titanate, Pb(Zr,Ti)O-3 (PZT), thin films have been realized by an all chemical process on a plastic substrate. The procedure is composed of three steps: the first one is the PZT deposition on aluminium thin substrate, the second step corresponds to the bonding PZT thin film to a polymer layer and the final step is the aluminium substrate etching. Diffractions and microscopy techniques were used to check the quality of the new PZT/polymer composite structure. Polarization hysteresis and permittivity measurements were also performed to determine the electrical characteristics of the composite. These results demonstrate that the recently developed PZT/polymer thin films are very attractive for both bending actuation and sensing as well as for low frequency vibrating energy harvesting applications.

【 授权许可】

Free