Superhard NbB2-x thin films deposited by dc magnetron sputtering

SURFACE & COATINGS TECHNOLOGY

卷:257

Article

Nedfors, Nils¹  Tengstrand, Olof²  Lu, Jun²  Eklund, Per²  Persson, Per O. A.²  Hultman, Lars²  Jansson, Ulf¹ 

[1] Uppsala Univ, Angstrom Lab, Dept Chem, SE-75121 Uppsala, Sweden

[2] Linkoping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Div, SE-58183 Linkoping, Sweden

关键词: Boride;    Magnetron sputtering;    Structure characterization;    Mechanical properties;    Friction;    Tribological properties;   

DOI  :  10.1016/j.surfcoat.2014.07.087

来源: Elsevier

【 摘 要 】

We have deposited weakly textured substoichiometric NbB2-x thin films by magnetron sputtering from an NbB2 target. The films exhibit superhardness (42 +/- 4 GPa), previously only observed in overstoichiometric TiB2 thin films, and explained by a self-organized nanostructuring, where thin TiB2 columnar grains hinder nucleation and slip of dislocations and a B-rich tissue phase between the grains prevent grain-boundary sliding. The wide homogeneity range for the NbB2 phase allows a similar ultra-thin B-rich tissue phase to form between thin (5-10 nm) columnar NbB2-x grains also for films with a B/Nb atomic ratio of 1.8, as revealed here by analytical aberration-corrected scanning transmission electron microscopy. Furthermore, a coefficient of friction of 0.16 is measured for an NbB2-x film sliding against stainless steel with a wear rate of 5 x 10(-7) mm(3)/Nm. X-ray photoelectron spectroscopy results suggest that the low friction is due to the formation of a lubricating boric acid film. (C) 2014 The Authors. Published by Elsevier B.V.

【 授权许可】

Free