Ion beam induced nano-space reactions and nano-wire formation in polymers by high energy sub-μm heavy ion beams

SURFACE & COATINGS TECHNOLOGY

卷:201

Article; Proceedings Paper

Tagawa, S. ; Tsukuda, S. ; Seki, S. ; Suglmoto, M. ; Sato, T. ; Oikawa, M. ; Sakai, T.

关键词: ion beam;    nano-space reactions;    polymer;    crosslinking;    charged particle;    nano-wire;   

DOI  :  10.1016/j.surfcoat.2006.12.033

来源: Elsevier

【 摘 要 】

A high energy focused ion beam with sub-mu m spatial resolution was used to produce isolated nano-wires which were planted on the substrate. Each charged particle penetrating into a polymer thin film gave a corresponding nano-wire, whose length reflected Precisely the thickness of the target film. Based on the tight connection of one end of each nano-wire on the substrate, the focused ion beam achieved position selective nano-wire or nano-wire bundle formation on the substrate. The ion beam, with the small spot size (phi) < 500 nm, was electrostatically controlled to irradiate the polymer thin films, leading to the patterns of nano-wire bundles with high spatial resolution < 500 nm. At a low fluence of the ion beam (< 10(9) ions cm(-2)), the isolated nano-wires were observed at specific points on the substrate spaced at regular intervals, using atomic force microscopy. (C) 2007 Elsevier B.V. All rights reserved.

【 授权许可】

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