Phase formation and structural evolution of multicomponent (CrFeCo)1-yNy films

SURFACE & COATINGS TECHNOLOGY

卷:412

Article

Rao, Smita G.¹  Shu, Rui¹  Boyd, Robert¹  Greczynski, Grzegorz¹  le Febvrier, Arnaud¹  Eklund, Per¹ 

[1] Linkoping Univ, Dept Phys Chem & Biol IFM, S-58183 Linkoping, Sweden

关键词: Multicomponent nitride;    Thin film;    Magnetron sputtering;    High entropy alloy;   

DOI  :  10.1016/j.surfcoat.2021.127059

来源: Elsevier

【 摘 要 】

The Cantor alloy (CoCrFeMnNi) and its variants, in bulk as well as thin films, have been extensively studied. They are known to exhibit cubic crystal structures and thermodynamic stability regardless of their complex chemical composition. Therefore, they may find use as hard, wear-resistant, corrosion and oxidation-resistant coatings. The addition of light elements, such as nitrogen, is known to help improve these properties further through processes such as amorphization and nitride compound formation. Here, we investigate the ternary CrFeCo system to study the effects of nitrogen addition. (CrFeCo)(1-y)N-y multicomponent thin films are grown on silicon substrates by DC magnetron sputtering. Changes in crystal structure, morphology, mechanical and electrical properties with gradual increases of nitrogen in the film are described and discussed. Increased addition of nitrogen from 14 at.% to 28 at.% in the film leads to a transformation from an fcc to a bcc crystal structure, affects both the mechanical and electrical properties. XPS analysis shows the tendency of nitrogen to bond with Cr over other metals. The films display hardness values between 7 and 11 GPa with resistivities values ranging between 28 and 165 mu Omega cm.

【 授权许可】

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