Memristive-biosensors: A new detection method by using nanofabricated memristors

SENSORS AND ACTUATORS B-CHEMICAL

卷:171

Article

Carrara, Sandro¹  Sacchetto, Davide^1,2  Doucey, Marie-Agnes⁵  Baj-Rossi, Camilla²  De Micheli, Giovanni^3,4 

[1] Ecole Polytech Fed Lausanne, Microelect Syst Lab LSM, CH-1015 Lausanne, Switzerland

[2] Ecole Polytech Fed Lausanne, Integrated Syst Lab LSI, CH-1015 Lausanne, Switzerland

[3] Ecole Polytech Fed Lausanne, Inst Elect Engn, CH-1015 Lausanne, Switzerland

[4] Ecole Polytech Fed Lausanne, Ctr Integrated Syst, CH-1015 Lausanne, Switzerland

[5] UNIL Univ Lausanne, Lausanne, Switzerland

关键词: Biosensor;    Silicon nanowire;    Memristive effect;    Schottky barrier;    Polyclonal antibodies;   

DOI  :  10.1016/j.snb.2012.04.089

来源: Elsevier

【 摘 要 】

This paper proposes a new detection methodology based on memristive-effect registered on silicon nanowire. The nano-wires are fabricated by a lithographic technique that allows precise and selective etching at the nanoscale. The wires are obtained in three main steps. Initially, a photoresist line defines the wire position. In a second step, silicon deep reactive ion etching is performed to obtain a scalloped trench. In the final step, the trench is reduced to a suspended nanowire after wet oxidation. The obtained wires present Schottky barrier contacts and are used for bio-molecular detection on dried samples. The memristive silicon nanowire devices are functionalized with rabbit antibodies in order to sense antigens. The sensitivity and detection limit of this new kind of nano-bio-sensors are estimated equal to 37 +/- 1 mV/fM and 3.4 +/- 1.8 fM, respectively. (C) 2012 Elsevier B.V. All rights reserved.

【 授权许可】

Free