Gas sensitive ZnO structures with reduced humidity-interference

SENSORS AND ACTUATORS B-CHEMICAL

卷:301

Article

Vallejos, S.^1,3  Gracia, I.¹  Pizurova, N.²  Figueras, E.¹  Cechal, J.³  Hubalek, J.^3,4  Cane, C.¹ 

[1] CSIC, Inst Microelect Barcelona IMB CNM, Barcelona, Spain

[2] Acad Sci Czech Republ, Inst Phys Mat, Brno, Czech Republic

[3] Brno Univ Technol, CEITEC Cent European Inst Technol, Brno, Czech Republic

[4] Brno Univ Technol, Fac Elect Engn & Commun, Dept Microelect, Brno, Czech Republic

关键词: Zinc oxide;    Nanostructures;    Gas sensor;    Humidity;   

DOI  :  10.1016/j.snb.2019.127054

来源: Elsevier

【 摘 要 】

Gas microsensors based on zinc oxide structures with rod- and needle-like morphology, both integrated via a non-catalyzed vapor-solid mechanism enabled using aerosol-assisted chemical vapor deposition, are developed. Analyses of the films via SEM, TEM, XPS, and water contact angle indicate a higher concentration of oxygen vacancies, higher aspect ratio and higher roughness factor for the needles than for the rods. Gas sensing tests towards hydrogen and carbon monoxide demonstrate reduced humidity-interference, and higher responses to the analytes for the needle-based systems compared to the rods. These results are attributed to the morphology of the sensitive materials, which not only affects the surface-area-to-volume-ratio of the films but also their surface chemistry. These findings indicate that a thorough optimization of morphology, structure and surface properties of gas sensitive metal oxides could allow for more reliable sensor operation in humid conditions.

【 授权许可】

Free