Miniature photonic crystal cavity sensor for simultaneous measurement of liquid concentration and temperature

SENSORS AND ACTUATORS B-CHEMICAL

卷:216

Article

Zhang, Ya-nan¹  Zhao, Yong^1,2  Hu, Hai-feng¹ 

[1] Northeastern Univ, Coll Informat Sci & Engn, Shenyang 110819, Peoples R China

[2] State Key Lab Synthet Automat Proc Ind, Shenyang 110819, Peoples R China

关键词: Liquid concentration measurement;    Temperature measurement;    Simultaneous measurement;    Miniature sensor;    Photonic crystal cavity;   

DOI  :  10.1016/j.snb.2015.04.094

来源: Elsevier

【 摘 要 】

A new method for simultaneous measurement of liquid concentration and temperature is proposed by using a miniature photonic crystal sensor, where two cascaded cavities (H0 cavity and H1 cavity) are separately located adjacent to one waveguide. The standard liquid whose concentration is fixed and known will be infiltrated in defected holes of the H1 cavity, and the measured liquid whose concentration is unknown will be infiltrated in defected holes of the HO cavity. Both the two independent resonant dips of cascaded cavities that can be simultaneously monitored at output spectrum of the waveguide will shift with the variation of liquid concentration or ambient temperature. By using finite difference time domain (FDTD) simulation, resonant properties of the two cavities are respectively optimized, and then the linear relationships between shifts of two resonant dips and liquid concentration/temperature are calculated. Finally, according to dual-wavelength matrix method, liquid concentration measurement with a resolution of 9.4322 ppm and temperature measurement with a resolution of 0.0136K are simultaneously realized, which can not only solve the cross-sensitivity problem between liquid concentration and temperature, but also provide a solution for two-parameter measurement in a miniaturized system. (C) 2015 Elsevier B.V. All rights reserved.

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