Gas sensing using polymer-functionalized deformable Fabry-Perot interferometers

SENSORS AND ACTUATORS B-CHEMICAL

卷:182

Article

St-Gelais, Raphael¹  Mackey, Gillian²  Saunders, John²  Zhou, Jingjing²  Leblanc-Hotte, Antoine¹  Poulin, Alexandre¹  Barnes, Jack A.²  Loock, Hans-Peter²  Brown, R. Stephen²  Peter, Yves-Alain¹ 

[1] Polytech Montreal, Dept Engn Phys, Stn Ctr Ville, Montreal, PQ H3C 3A7, Canada

[2] Queens Univ, Dept Chem, Kingston, ON K7L 3N6, Canada

关键词: Gas sensing;    Fabry-Perot interferomer;    Polymer swelling;    Volatile organic compound;    Silicon micromachining;   

DOI  :  10.1016/j.snb.2013.02.016

来源: Elsevier

【 摘 要 】

We report a chemical vapor sensor in which polymer swelling, upon analyte absorption, is used to deform an on-chip silicon Fabry-Perot interferometer (FPI). The magnitude of the deformation, recorded through the resonance wavelength shift, is proportional to the analyte concentration in accordance with a simplified analytical model and with finite element simulations. Conventional and phenyl-doped polydimethylsiloxane (PDMS) polymers are used to functionalize different interferometers, which are tested for the detection of two volatile organic compounds, i.e. m-xylene and cyclohexane. The detection of m-xylene concentrations down to 34 ppm-limited by our flow-meter setup is achieved experimentally. Based on the sensitivities and the noise characteristics of the devices, limits of detection (LODs) of 1.6 ppm m-xylene and 6.3 ppm cyclohexane are expected. (C) 2013 Elsevier B.V. All rights reserved.

【 授权许可】

Free