Enhancing the photon-extraction efficiency of site-controlled quantum dots by deterministically fabricated microlenses

OPTICS COMMUNICATIONS

卷:413

Article

Kaganskiy, Arsenty¹  Fischbach, Sarah¹  Strittmatter, Andre^1,2  Rodt, Sven¹  Heindel, Tobias¹  Reitzenstein, Stephan¹ 

[1] Tech Univ Berlin, Inst Festkorperphys, Hardenbergstr 36, D-10623 Berlin, Germany

[2] Otto von Guericke Univ, Abt Halbleiterepitaxie, Univ Pl 2, D-39106 Magdeburg, Germany

关键词: Site-controlled quantum dot;    Single-photon source;    In-situ electron-beam lithography;    Microlens;   

DOI  :  10.1016/j.optcom.2017.12.032

来源: Elsevier

【 摘 要 】

We report on the realization of scalable single-photon sources (SPSs) based on single site-controlled quantum dots (SCQDs) and deterministically fabricated microlenses. The fabrication process comprises the buried-stressor growth technique complemented with low-temperature in-situ electron-beam lithography for the integration of SCQDs into microlens structures with high yield and high alignment accuracy. The microlens-approach leads to a broadband enhancement of the photon-extraction efficiency of up to (21 +/- 2)% and a high suppression of multi-photon events with g((2))(tau = 0) < 0.06 without background subtraction. The demonstrated combination of site-controlled growth of QDs and in-situ electron-beam lithography is relevant for arrays of efficient SPSs which, can be applied in photonic quantum circuits and advanced quantum computation schemes. (C) 2017 Elsevier B.V. All rights reserved.

【 授权许可】

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