Dynamic spectroscopic ellipsometry based on a one-piece polarizing interferometric scheme

OPTICS COMMUNICATIONS

卷:454

Article

Dembele, Vamara¹  Choi, Sukhyun¹  Chegal, Won²  Choi, Inho¹  Paul, Madhan Jayakumar¹  Kim, Junho¹  Kim, Daesuk¹ 

[1] Chonbuk Natl Univ, Div Mech Syst Engn, Jeonju 54896, South Korea

[2] Korea Res Inst Stand & Sci, Adv Instrumentat Inst, Daejeon 34113, South Korea

关键词: Ellipsometry;    Thin films;    Phase measurement;    Interferometry;    Metrological instrumentation;   

DOI  :  10.1016/j.optcom.2019.124426

来源: Elsevier

【 摘 要 】

A dynamic spectroscopic ellipsometer based on a one-piece interferometric polarization-modulation is described. The proposed system can provide spectro-ellipsometric parameters psi(lambda) and Delta(lambda) with a real time speed of a few tens of milliseconds for 1,640-points spectra while maintaining high precision of less than 0.02 degrees. The ultrafast measurement capability enables the novel concept to be applied for a dynamic solution by which we can measure even the thin film thickness of moving samples dynamically.

【 授权许可】

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