Variability in Planar FeFETs-Channel Percolation Impact

卷:70

Article

关键词: FLUCTUATION;   

DOI  :  10.1109/TED.2023.3277421

来源: SCIE

【 摘 要 】

We examine the origins of threshold voltage (V-TH) variability in planar ferroelectric FETs (FeFETs) considering process variations and source-drain channel percolation. Using a percolation-aware physics-based multidomain FeFET model, we are able to capture the V-TH statistics measured on fabricated devices across different channel dimensions. We show that the bimodal V-TH distribution observed in large devices can be explained by percolation, while the transition to monomodal distribution in scaled devices is qualitatively reproduced by the overlapping Pelgrom-type and percolative variabilities in the model. We further demonstrate that in terms of device geometry, the percolation-related FeFET V-TH variability is minimized for a channel aspect ratio equal to 1.

【 授权许可】

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