Ultra-High Q of 11000 in Surface Acoustic Wave Resonators by Dispersive Modulation

卷:44

Article

关键词: LITHIUM-NIOBATE;    SAW RESONATORS;   

DOI  :  10.1109/LED.2023.3258459

来源: SCIE

【 摘 要 】

In this work, a method to reduce the acoustic energy loss has been proposed, and the GHz ultra-high Q acoustic wave resonators based on the LiTaO3-on-SiC (LTOSiC) substrate were demonstrated. By modulating the ratio of the LiTaO3 film thickness to interdigital transducer pitch (h(LT)/(?)), the adjoined X and Z polarization components of the guided shear horizontal surface acoustic wave (SH-SAW) can be significantly diminished, and the acoustic energy loss can be effectively reduced. The modulated dispersive SH-SAW resonator shows an excellent Bode -Q of 11000 and a Figure of merit (FoM) of 620. In addition, as predicted by the propagation loss of the acoustic delay lines on LTOSiC, high Q factors can be achieved when h(LT)/(?) is less than 0.14. These results suggest the feasibility of developing low-loss acoustic devices on the LTOSiC substrate for wireless communications.

【 授权许可】

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