Effect of Carbon Content onto Silicon-Carbon Alloys Properties Elaborated For The Passivation of Monocrystalline Solar Cell

Research & Reviews: Journal of Engineering and Technology

article

Salwa Merazga¹  Aissa Keffous¹  Abdelhak Cheriet²  Khadidja Khaldi²  Michel Rosso³  Mohamed Kechouane³  Noureddine Gabouze³ 

[1] Research Center Semiconductor Technology for Energetic;Laboratory of Materials Physics;Laboratory of Condensed Matter Physics ,(PMC). Joint Research Unit 7643 du CNRS et de Ecole Polytechnique

关键词: Plasma enhancedchemical vapour deposition process;    Silicon-carbon;    Passivation;    Solar cell;   

来源: Research & Reviews

【 摘 要 】

A hydrogenated amorphous silicon carbon alloys thin films have been grown at low power regime via plasma enhanced chemical vapour deposition process (PECVD) with decomposition of silane (SiH4) and methane (CH4) at varying carbon content (x). The carbon content is restricted to the range 0

【 授权许可】

Unknown