Optimization of La 2−x Sr x CuO 4 Single Crystal Film Growth via Molecular Beam Epitaxy

Condensed Matter

article

Xi He¹  Xiaotao Xu¹  Xiaoyan Shi⁴  Ivan Božović¹ 

[1] Condensed Matter Physics and Materials Science Division, Brookhaven National Laboratory;Department of Chemistry, Yale University;Energy Sciences Institute, Yale University;Department of Physics, The University of Texas at Dallas

关键词: superconductivity;    cuprates;    thin film synthesis;   

DOI  :  10.3390/condmat8010013

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

Atomic layer-by-layer molecular beam epitaxy (ALL-MBE) combined with ozone is one of the best methods to fabricate single-crystal thin films of complex oxides. Cuprate such as La2−xSrxCuO4 (LSCO) is a representative complex-oxide high-temperature superconductor (HTS) material. Our group utilizes this method to produce high-quality single-crystal HTS films with atomically smooth surfaces and interfaces. In addition, ALL-MBE enables us to engineer multilayer heterostructures with atomic precision. This allows the fabrication of tunnel junctions, various nanostructures, and other HTS devices of interest for superconducting electronics. We have synthesized over three thousand LSCO thin films in the past two decades. These films’ structural and electronic properties have been studied and characterized by various methods. Here, we distill the extensive experience we accumulated into a step-by-step protocol to fabricate atomically perfect LSCO films. The recipe includes substrate preparation, ozone generation and distillation, source calibration, the in situ monitoring of the film synthesis, post-growth annealing, and ex situ characterization. It discloses a reproducible way to fabricate single-crystal LSCO films for basic research and HTS electronic applications.

【 授权许可】

CC BY