Research on A Novel Reliable MEMS Bistable Solid State Switch

Defence science journal

article

Bo He¹  Wenzhong Lou¹  Hengzhen Feng¹  Yuecen Zhao¹ 

[1]National Key Laboratory of Electro-Mechanics Engineering and Control, School of Mechatronical Engineering, Beijing Institute of Technology

关键词: Experimental methods;    Heat conduction theory;    MEMS-bS3;    MEMS solid-state fuze;    Simulation;   

DOI  :  10.14429/dsj.72.17800

学科分类：社会科学、人文和艺术（综合）

来源: Defence Scientific Information & Documentation Centre

【 摘 要 】

As a result of the unpredictable nature of extreme environments (including temperature, humidity, impact, and other factors), micro-electro-mechanical systems (MEMS) solid-state fuze control modules have an urgent requirement for a MEMS solid-state switch (MEMS-S3). In particular, this switch must remain stable without any energy input after a state transition (i.e., it must be bistable). In this paper, a MEMS bistable solid-state switch (MEMS-bS3) is designed that is based on the concept of producing a micro-explosion. The reliable state switching of the MEMS-bS3 is studied via heat conduction theory and verified via both simulations and experimental methods. The experimental results show that these switches can produce micro-explosions driven by 33 V/47 μF pulse energy. However, the metal film bridge (MFB) structures used in this switch with smaller dimensions (80×20 μm2, 90×30 μm2, and 100×40 μm2) could not enable the switch to realize a reliable state transition, and the state transition rate was less than 40%. When the MFB dimensions reached 120×60 μm2 or 130×70 μm2, the state transition rate exceeded 80%, and the response time was on the μs-scale.

【 授权许可】

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