Influence of random roughness on cantilever resonance frequency

Article

关键词: SURFACE STRESS;    TRANSDUCTION;    MICROSCOPY;    KINETICS;   

DOI  :  10.1103/PhysRevB.82.155438

来源: SCIE

【 摘 要 】

In this paper we investigate the influence of random roughness on the oscillation frequency of cantilevers coated with thin film overlayers. First the theory expressions for the roughness-induced frequency shift are derived using the cantilever equation of motion. Subsequently it is shown that the roughness induced shift depends on the particular roughness parameters, assuming the general case of self-affine rough surfaces for the overlayer film, the material properties of the overlayer film, and the dimensions mainly of the bare cantilever. Indeed it is shown that the roughness influence becomes significant for relatively thin cantilevers (<= 1 mu m), and increased local surface slopes (>0.5) within the limits of applicability of the proposed formalism. The results of this study can be used in high precision frequency sensing applications in the field of micro/nanomechanics.

【 授权许可】

Free