Tin-vacancy acceptor levels in electron-irradiated n-type silicon

Article

关键词: POINT-DEFECTS;    MOSSBAUER-SPECTROSCOPY;    HYDROGEN COMPLEXES;    PAIR;    IMPLANTATIONS;    CRYSTALLINE;    DIVACANCIES;    GENERATION;    PLATINUM;    BEHAVIOR;   

DOI  :  10.1103/PhysRevB.62.4535

来源: SCIE

【 摘 要 】

Si crystals (n-type, fz) with doping levels between 1.5x10(14) and 2x10(16)cm(-3) containing in addition similar to 10(18) Sn/cm(3) were irradiated with 2-MeV electrons to different doses and subsequently studied by deep level transient spectroscopy, Mossbauer spectroscopy, and positron annihilation. Two tin-vacancy (Sn-V) levels at E-c - 0.214 eV and E-c - 0.501 eV have been identified (E-c denotes the conduction band edge). Based on investigations of the temperature dependence of the electron-capture cross sections, the electric-field dependence of the electron emissivity, the anneal temperature, and the defect-introduction rate, it is concluded that these levels are the double and single acceptor levels, respectively, of the Sn-V pair. These conclusions are in agreement with electronic structure calculations carried out using a local spin-density functional theory, incorporating pseudopotentials to eliminate the core electrons, and applied to large H-terminated clusters. Thus, the Sn-V pair in Si has five different charge states corresponding to four levels in the band gap.

【 授权许可】

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