CVD growth of large-area monolayer WS2 film on sapphire through tuning substrate environment and its application for high-sensitive strain sensor

Nanoscale Research Letters

Research

Jing Li¹  Changjie Zhou²  Weihuang Yang³  Xiangshuo Chen³  Gaofeng Wang³  Chaoran Liu³  Yuanbin Mu³  Ningjing Jin³  Linxi Dong³  Weipeng Xuan³  Jiahao Song³  Silin He⁴  Jingzhi Shang⁴  Jiajun Chen⁵  Chunxiao Cong⁶ 

[1] Collaborative Innovation Center for Optoelectronic Semiconductors and Efficient Devices, Pen-Tung Sah Institute of Micro-Nano Science and Technology, 361005, Xiamen, China;Department of Physics, School of Science, Jimei University, 361021, Xiamen, China;Engineering Research Center of Smart Microsensors and Microsystems, Ministry of Education, College of Electronics and Information, Hangzhou Dianzi University, 310018, Hangzhou, China;Institute of Flexible Electronics (IFE), Northwestern Polytechnical University (NPU), 1 Dongxiang Road, Chang’an District, 710129, Xi’an, China;State Key Laboratory of ASIC and System, School of Information Science and Technology, Fudan University, 200433, Shanghai, China;State Key Laboratory of ASIC and System, School of Information Science and Technology, Fudan University, 200433, Shanghai, China;High Tech Center for New Materials, Novel Devices and Cutting Edge Manufacturing, Yiwu Research Institute of Fudan University, Chengbei Road, 322000, Yiwu City, Zhejiang, China;

关键词: 2D materials;    WS;    CVD;    COMSOL;    Strain sensor;   

DOI  :  10.1186/s11671-023-03782-z

 received in 2022-07-22, accepted in 2023-01-28,  发布年份 2023

来源: Springer

【 摘 要 】

Large-area, continuous monolayer WS2 exhibits great potential for future micro-nanodevice applications due to its special electrical properties and mechanical flexibility. In this work, the front opening quartz boat is used to increase the amount of sulfur (S) vapor under the sapphire substrate, which is critical for achieving large-area films during the chemical vapor deposition processes. COMSOL simulations reveal that the front opening quartz boat will significantly introduce gas distribute under the sapphire substrate. Moreover, the gas velocity and height of substrate away from the tube bottom will also affect the substrate temperature. By carefully optimizing the gas velocity, temperature, and height of substrate away from the tube bottom, a large-scale continues monolayered WS2 film was achieved. Field-effect transistor based on the as-grown monolayer WS2 showed a mobility of 3.76 cm2V−1 s−1 and ON/OFF ratio of 106. In addition, a flexible WS2/PEN strain sensor with a gauge factor of 306 was fabricated, showing great potential for applications in wearable biosensors, health monitoring, and human–computer interaction.

【 授权许可】

CC BY   
© The Author(s) 2023

【 图 表 】

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