The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

Beilstein Journal of Nanotechnology

article

Victor Deinhart¹  Lisa-Marie Kern³  Jan N. Kirchhof⁴  Sabrina Juergensen⁴  Joris Sturm¹  Enno Krauss⁵  Thorsten Feichtner⁶  Sviatoslav Kovalchuk⁴  Michael Schneider³  Dieter Engel³  Bastian Pfau³  Bert Hecht⁵  Kirill I. Bolotin⁴  Stephanie Reich⁴  Katja Höflich² 

[1] Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik;Corelab Correlative Microscopy and Spectroscopy;Max Born Institute for Nonlinear Optics and Short Pulse Spectroscopy;Freie Universität Berlin;Department of Experimental Physics 5, Röntgen Research Center for Complex Material Research ,(RCCM), Physics Institute, University of Würzburg;Dipartimento di Fisica, Politecnico di Milano, Piazza Leonardo da Vinci

关键词: automated patterning;    focused He ion beam;    graphene;    magneticmultilayers;    mechanical resonator;    pattern generation;    plasmonicantennas;    two-dimensional materials;   

DOI  :  10.3762/bjnano.12.25

学科分类：环境监测和分析

来源: Beilstein - Institut zur Foerderung der Chemischen Wissenschaften

【 摘 要 】

Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such ahigh patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial. Here, weintroduce the Python toolbox FIB-o-mat for automated pattern creation and optimization, providing full flexibility to accomplishdemanding patterning tasks. FIB-o-mat offers high-level pattern creation, enabling high-fidelity large-area patterning and systematic variations in geometry and raster settings. It also offers low-level beam path creation, providing full control over the beammovement and including sophisticated optimization tools. Three applications showcasing the potential of He ion beam nanofabrication for two-dimensional material systems and devices using FIB-o-mat are presented.

【 授权许可】

CC BY