Beilstein Journal of Nanotechnology | |
The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication | |
article | |
Victor Deinhart1  Lisa-Marie Kern3  Jan N. Kirchhof4  Sabrina Juergensen4  Joris Sturm1  Enno Krauss5  Thorsten Feichtner6  Sviatoslav Kovalchuk4  Michael Schneider3  Dieter Engel3  Bastian Pfau3  Bert Hecht5  Kirill I. Bolotin4  Stephanie Reich4  Katja Höflich2  | |
[1] Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik;Corelab Correlative Microscopy and Spectroscopy;Max Born Institute for Nonlinear Optics and Short Pulse Spectroscopy;Freie Universität Berlin;Department of Experimental Physics 5, Röntgen Research Center for Complex Material Research ,(RCCM), Physics Institute, University of Würzburg;Dipartimento di Fisica, Politecnico di Milano, Piazza Leonardo da Vinci | |
关键词: automated patterning; focused He ion beam; graphene; magneticmultilayers; mechanical resonator; pattern generation; plasmonicantennas; two-dimensional materials; | |
DOI : 10.3762/bjnano.12.25 | |
学科分类:环境监测和分析 | |
来源: Beilstein - Institut zur Foerderung der Chemischen Wissenschaften | |
【 摘 要 】
Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such ahigh patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial. Here, weintroduce the Python toolbox FIB-o-mat for automated pattern creation and optimization, providing full flexibility to accomplishdemanding patterning tasks. FIB-o-mat offers high-level pattern creation, enabling high-fidelity large-area patterning and systematic variations in geometry and raster settings. It also offers low-level beam path creation, providing full control over the beammovement and including sophisticated optimization tools. Three applications showcasing the potential of He ion beam nanofabrication for two-dimensional material systems and devices using FIB-o-mat are presented.
【 授权许可】
CC BY
【 预 览 】
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RO202303290004040ZK.pdf | 4430KB | download |