Miniaturized differential scanning calorimeter with an integrated mass sensing system: first steps

Journal of Sensors and Sensor Systems

article

Johanna Distler¹  Thomas Wöhrl¹  Robin Werner¹  Michael Gerlach²  Michael Gollner²  Florian Linseis²  Jaroslaw Kita¹  Ralf Moos¹ 

[1] Department of Functional Materials, University of Bayreuth;Linseis Thermal Analysis

DOI  :  10.5194/jsss-12-9-2023

学科分类：医学（综合）

来源: Copernicus Publications

【 摘 要 】

In this paper, the first steps towards integrating a mass sensing systeminto an existing miniaturized ceramic DSC (differential scanningcalorimetry) chip are presented. A vibration setup is developed based on the mass-dependent change in frequency of the DSC chip as an oscillatingcantilever. A simulation model reveals that the resolution of themeasurement can be improved by reducing the chip thickness. In this study,different measurement methods (acoustic, optical, and piezoresistive) areinvestigated. Three complete measurement systems are set up and evaluatedwith regard to their integration in the DSC chip. All presented measurementmethods show promising results and already allow mass measurements with aresolution of 100  µ g.

【 授权许可】

CC BY