Optoelectronic Angular Displacement Measurement Technology for 2-Dimensional Mirror Galvanometer

Sensors

Shao-Kang Hung¹  Yu-Hsin Chung¹  Kai-Hung Chang¹  Cheng-Lung Chen¹ 

[1] Department of Mechanical Engineering, National Yang Ming Chiao Tung University, No. 1001, University Road, Hsinchu 30010, Taiwan;

关键词: angle sensor;    optoelectronic sensor;    parametric design;   

DOI  :  10.3390/s22030872

来源: DOAJ

【 摘 要 】

The mirror galvanometer is a crucial component of laser cutters/engravers. Novel two-dimensional mirror galvanometers demonstrate less trajectory distortion than traditional one-dimensional ones. This article proposes an optoelectronic sensor that measures a mirror’s inclinations in two dimensions simultaneously. The measuring range, resolution, and sampling rate are ±10°, 0.0265°, and 2 kHz, respectively. With the proposed sensor, a closed-loop control can be further implemented to achieve precision laser machining. Its compact size and low cost meet the requirements of miniature laser engravers, which have become popular in recent years.

【 授权许可】

Unknown