Analysis of an Electrostatic MEMS Squeeze-film Drop Ejector

Sensors & Transducers

Edward P. Furlani¹ 

[1] Eastman Kodak Research Laboratories 1999 Lake Avenue, Rochester, New York 14650-2216, USA;

关键词: MEMS inkjet;    Microdispensing;    Drop-on-demand;    Squeeze film drop ejector;   

DOI  :  

来源: DOAJ

【 摘 要 】

We present an analysis of an electrostatic drop-on-demand MEMS fluid ejector. The ejector consists of a microfluidic chamber with a piston that is suspended a few microns beneath a nozzle plate. A drop is ejected when a voltage is applied between the orifice plate and the piston. This produces an electrostatic force that moves the piston towards the nozzle. The moving piston generates a squeeze-film pressure distribution that causes drop ejection. We discuss the operating physics of the ejector and present a lumped-element model for predicting its performance. We calibrate the model using coupled structural-fluidic CFD analysis.

【 授权许可】

Unknown