期刊论文详细信息
Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki | |
SENSITIVE ELEMENTS FOR CAPACITOR SENSORS OF ACCELERATION | |
N. I. Mukhurov1  | |
[1] Институт физики НАН Беларуси; | |
关键词: емкостной датчик ускорения; чувствительный элемент; плоскопараллельная и объемная конструкции; характеристики; | |
DOI : | |
来源: DOAJ |
【 摘 要 】
In article variants of designs of sensitive elements for capacitor sensors of acceleration in plane-parallel and volumetric structure are offered. By results of the analysis of functional characteristics the range of sensitivity of sensors is established depending on design parameters.
【 授权许可】
Unknown