SENSITIVE ELEMENTS FOR CAPACITOR SENSORS OF ACCELERATION

Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki

N. I. Mukhurov¹ 

[1] Институт физики НАН Беларуси;

关键词: емкостной датчик ускорения;    чувствительный элемент;    плоскопараллельная и объемная конструкции;    характеристики;   

DOI  :  

来源: DOAJ

【 摘 要 】

In article variants of designs of sensitive elements for capacitor sensors of acceleration in plane-parallel and volumetric structure are offered. By results of the analysis of functional characteristics the range of sensitivity of sensors is established depending on design parameters.

【 授权许可】

Unknown