A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe

IEEE Photonics Journal

Jing Lv¹  Ying-Jun Lei²  Zhen-Ying Cheng²  Zhen-Xin Chang²  Rui-Jun Li²  Xin Liu²  Kuang-Chao Fan² 

[1] China National Accreditation Service for Conformity Assessment, Beijing, China;School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, China;

关键词: Accelerometer;    leaf spring;    focus probe;    micro vibration;    and uncertainty;   

DOI  :  10.1109/JPHOT.2019.2894690

来源: DOAJ

【 摘 要 】

A new micro accelerometer is proposed to measure and reduce low-frequency vibrations actively. It is mainly composed of a seismic mass, a leaf spring, and a focus probe modified from a digital versatile disc (DVD) pickup head. When a vibration occurs, the leaf spring will exhibit an elastic deformation; the seismic mass will move up and down due to the effect of inertia, whose displacement can be detected by the focus probe. Therefore, the measured acceleration can be obtained. The accelerometer was designed, and its proper parameters were obtained. The accelerometer was calibrated and tested using a high-precision vibration generator. The experimental results demonstrate that the proposed accelerometer has a sensitivity of 10.8 V/g, a resolution of 3.0 × 10^-4 g, and a working frequency range of 1-10 Hz. Also, the uncertainty of the accelerometer was analyzed in detail and an evaluation result of 7.0 × 10^-4 g (K = 2) was obtained. It can be used to detect the low-frequency microvibrations in high-precision measurement and machining fields.

【 授权许可】

Unknown