An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications

Sensors

Muhammad Aftab Rafiq¹  Florin Udrea²  Syed Zeeshan Ali³  Ibraheem Haneef⁴  Mohtashim Mansoor⁴  Suhail Akhtar⁵  Andrea De Luca⁶ 

[1] Technology (NUST), H-12, Islamabad 44000, Pakistan;Cambridge CMOS Sensors Ltd., Deanland House, 160-Cowley Road, Cambridge CB4 0DL, UK;Department of Engineering, University of Cambridge, 9-JJ Thomson Avenue, Cambridge CB3 0FA, UK;Institute of Avionics and Aeronautics, Air University, E-9, Islamabad 44000, Pakistan;;National University of Sciences &Pakistan Institute of Engineering and Applied Sciences, Nilore, Islamabad 45650, Pakistan;

关键词: SOI;    CMOS;    MEMS;    aerospace;    fluid dynamics;    dense sensor packing;    thermodiodes;    DRIE;    multi-sensor;    sensor system;    thermal flow rate sensor;    piezoresistive pressure sensor;   

DOI  :  10.3390/s16111608

来源: DOAJ

【 摘 要 】

An SOI CMOS multi-sensor MEMS chip, which can simultaneously measure temperature, pressure and flow rate, has been reported. The multi-sensor chip has been designed keeping in view the requirements of researchers interested in experimental fluid dynamics. The chip contains ten thermodiodes (temperature sensors), a piezoresistive-type pressure sensor and nine hot film-based flow rate sensors fabricated within the oxide layer of the SOI wafers. The silicon dioxide layers with embedded sensors are relieved from the substrate as membranes with the help of a single DRIE step after chip fabrication from a commercial CMOS foundry. Very dense sensor packing per unit area of the chip has been enabled by using technologies/processes like SOI, CMOS and DRIE. Independent apparatuses were used for the characterization of each sensor. With a drive current of 10 µA–0.1 µA, the thermodiodes exhibited sensitivities of 1.41 mV/°C–1.79 mV/°C in the range 20–300 °C. The sensitivity of the pressure sensor was 0.0686 mV/(Vexcit kPa) with a non-linearity of 0.25% between 0 and 69 kPa above ambient pressure. Packaged in a micro-channel, the flow rate sensor has a linearized sensitivity of 17.3 mV/(L/min)−0.1 in the tested range of 0–4.7 L/min. The multi-sensor chip can be used for simultaneous measurement of fluid pressure, temperature and flow rate in fluidic experiments and aerospace/automotive/biomedical/process industries.

【 授权许可】

Unknown