Ultrathin MEMS thermoelectric generator with Bi2Te3/(Pt, Au) multilayers and Sb2Te3 legs

Nano Convergence

Fengdan Wang¹  Xuecheng Fu¹  Xinwei Wang²  Fangyuan Sun³  Zhanxun Che³  Zhenhua Wu⁴  Zhiyu Hu⁴  Erzhen Mu⁴  Yang Liu⁴ 

[1] Center for Advanced Electronic Materials and Devices (AEMD) of Shanghai Jiao Tong University;College of Pipeline and Civil Engineering, China University of Petroleum (East China);Institute of Engineering Thermophysics, Chinese Academy of Sciences;National Key Laboratory of Science and Technology on Micro-Nano Fabrication, Shanghai Jiao Tong University;

关键词: MEMS;    Multilayers;    TE devices;    Bi2Te3;   

DOI  :  10.1186/s40580-020-0218-x

来源: DOAJ

【 摘 要 】

Abstract Multilayer structure is one of the research focuses of thermoelectric (TE) material in recent years. In this work, n-type 800 nm Bi2Te3/(Pt, Au) multilayers are designed with p-type Sb2Te3 legs to fabricate ultrathin microelectromechanical systems (MEMS) TE devices. The power factor of the annealed Bi2Te3/Pt multilayer reaches 46.5 μW cm−1 K−2 at 303 K, which corresponds to more than a 350% enhancement when compared to pristine Bi2Te3. The annealed Bi2Te3/Au multilayers have a lower power factor than pristine Bi2Te3. The power of the device with Sb2Te3 and Bi2Te3/Pt multilayers measures 20.9 nW at 463 K and the calculated maximum output power reaches 10.5 nW, which is 39.5% higher than the device based on Sb2Te3 and Bi2Te3, and 96.7% higher than the Sb2Te3 and Bi2Te3/Au multilayers one. This work can provide an opportunity to improve TE properties by using multilayer structures and novel ultrathin MEMS TE devices in a wide variety of applications.

【 授权许可】

Unknown