Charge Pumped MEMS Actuation for High Force and Large Displacement

Sensors & Transducers

Ronald BOUTTE¹  Brian W. BAKER¹  Ian R. HARVEY¹  Alex L. HOGAN²  Kurtis R. FORD³ 

[1] University of Utah Nanofab, 36 S. Wasatch Dr., SLC, Utah, 84112 USA ;Blackrock Microsystems, 630 Komas Drive, Suite 200, Salt Lake City, UT 84108-1229, USA ;Sandia National Laboratories PO Box 5800, MS 1069 Albuquerque, NM 87185, USA;

关键词: MEMS;    Actuator;    Out-of-plane;    Charge-pump;    Biomimetic accommodating lens;    Energy harvesting.;   

DOI  :  

来源: DOAJ

【 摘 要 】

Charge-pumping represents an unusual approach to MEMS actuation with the potential benefits of large displacement coupled with high force, as well as simple out-of-plane motions, large-scale self-assembly, simple single contact and even the possibility of non-contact actuation. Charge pumping is conducive to energy scavenging techniques such as tribolectric harvesting, useful in aerospace and satellite applications, but it comes at the cost of modifications to the electronics control infrastructure now based on two-terminal (power/ground) voltage and current paradigms. Non-contact examples will be shown, including devices that can be used for microscale biomimetic optics.

【 授权许可】

Unknown