A Piezoelectric Micromachined Ultrasound Transducers (pMUT) Array, for Wide Bandwidth Underwater Communication Applications

Proceedings

Sina Sadeghpour¹  Robert Puers¹  Ken Haenen²  Paulius Pobedinskas² 

[1] ESAT-MICAS/KU Leuven, B-3001 Heverlee, Belgium;Institute for Materials Research (IMO), Hasselt University, Wetenschapspark 1, B-3590 Diepenbeek, Belgium;

关键词: aluminum nitride (AlN);    piezoelectric micromachined ultrasound transducer (pMUT);    deep reactive ion etching (DRIE);    laser doppler vibrometer (LDV);    X-ray diffractometer (XRD);   

DOI  :  10.3390/proceedings1040364

来源: DOAJ

【 摘 要 】

This paper presents an array of five aluminum nitride (AlN) based piezoelectric micromachined ultrasound transducers (pMUTs) with different dimensions operating at 540–2360 kHz in air. Due to the damping effect of water or oil on the vibration of each individual pMUT, their frequency response tends to merge and significantly increases the bandwidth of the pMUTs array. The device is fabricated based on the deep reactive ion etching (DRIE) process on the backside of an SOI wafer to realize the circular diaphragms. Theoretical calculations, measured frequency response, simulation results, and detail of the fabrication are explained in this paper.

【 授权许可】

Unknown