Humidity sensing of thin film perovskite nanostructure for improved sensitivity and optical performance

Journal of Materials Research and Technology

Husna Mardiyah Burhanuddin¹  Suhaila Sepeai²  Noor Hazirah Hashim³  Mohd Asri Mat Teridi⁴  Muhammad Arif Riza⁵  Nurul Nazli Rosli⁶  Fauzan Ahmad⁶  Norasikin Ahmad Ludin⁶  Muhammad Quisar Lokman⁶  Mohd Adib Ibrahim⁶ 

[1] Corresponding authors.;Physical Sciences, Heriot-Watt University, 62200 Putrajaya, Malaysia;;School of Engineering &Faculty of Applied Sciences, Universiti Teknologi MARA Pahang, 26400 Bandar Jengka, Pahang Darul Makmur, Malaysia;Malaysia-Japan International Institute of Technology, Universiti Teknologi Malaysia Kuala Lumpur, 54100 Kuala Lumpur, Malaysia;Solar Energy Research Institute, Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor Darul Ehsan, Malaysia;

关键词: Humidity sensor;    Nickel;    Optical sensor;    Zinc tin oxide;   

DOI  :  

来源: DOAJ

【 摘 要 】

This paper presents a humidity sensing based on perovskites nanostructured thin film for improved sensitivity and optical performance. The nickel-doped zinc thin oxide (NZTO) perovskites thin film was used as a sensing material for the humidity sensing application. The NZTO was deposited on borosilicate glass substrates via aerosol-assisted chemical vapour deposition (AACVD) and nickel (Ni) dopant with 2 %mol was added into the precursor solution. The optical performance was investigated by inserting the NZTO into the optical reflection cavity. The cavity comprises NZTO on the glass that placed in a fixed position in front of single-mode fiber (SMF) and SMF was adjusted using x-direction of the 3-axis stage to obtained different cavity lengths. The performance was evaluated from the free-spectral range (FSR) and extinction ratio (ER) of the different cavity lengths. Then, the cavity with an optimized length was placed inside the humidity chamber for sensing applications. The result shows that the optimized cavity length is 100 µm with FSR and ER of 12.05 nm and 7.247 dB. The sensitivity of the humidity sensing is 0.2657 nm/RH% indicates that the NZTO is an excellent candidate for humidity sensing application.

【 授权许可】

Unknown