Electromagnetic Investigation of a CMOS MEMS Inductive Microphone

Sensors & Transducers

Brahim MEZGHANI¹  Mohamed MASMOUDI¹  Farès TOUNSI¹  Salvador MIR²  Libor RUFER² 

[1] Electronics, Microtechnology and Communication (EMC), National Engineering School of Sfax Route Soukra, BP 1173, 3038 Sfax, Tunisia;TIMA Laboratory (CNRS, G-INP, UJF) 46, Avenue Félix Viallet, 38031 Grenoble, France;

关键词: MEMS;    Electromagnetic modeling;    inductive microphone;    micromachined inductors;    induced voltage;   

DOI  :  

来源: DOAJ

【 摘 要 】

This paper presents a detailed electromagnetic modeling for a new structure of a monolithic CMOS micromachined inductive microphone. We have shown, that the use of an alternative current (AC) in the primary fixed inductor results in a substantially higher induced voltage in the secondary inductor comparing to the case when a direct current (DC) is used. The expected increase of the induced voltage can be expressed by a voltage ratio of AC and DC solutions that is in the range of 3 to 6. A prototype fabrication of this microphone has been realized using a combination of standard CMOS 0.6 µm process with a CMOS-compatible post-process consisting in a bulk micromachining technology. The output voltage of the electrodynamic microphone that achieves the µV range can be increased by the use of the symmetric dual-layer spiral inductor structure.

【 授权许可】

Unknown