Formation of nanostructured iridium and polycluster diamond films

Tekhnologiya i Konstruirovanie v Elektronnoi Apparature

关键词: nano-structured film of iridium and diamond;    magnetron sputtering;    microwave discharge;    microelectronics;   

DOI  :  

来源: DOAJ

【 摘 要 】

Iridium films and layered structures "iridium — diamond" were formed on Al2O3, MgO and SrTiO3 substrates. Iridium films were obtained by magnetron sputtering, and polycluster diamond films — by microwave discharge method. Structure of iridium and diamond films was studied depending on formation conditions. Application of polycluster diamond films as heatsink for hybrid microcircuit and control grid of electronic devices was considered.

【 授权许可】

Unknown