Toluene sensing characteristics of tin oxide-based gas sensor deposited with various amounts of metalloporphyrin

Micro and Nano Systems Letters

Byeonghwa Cho¹  Jongbaeg Kim¹ 

[1] School of Mechanical Engineering, Yonsei University;

关键词: Metalloporphyrin;    Gas sensor;    Functionalization;    Volatile organic compounds;    Optimization;   

DOI  :  10.1186/s40486-022-00145-8

来源: DOAJ

【 摘 要 】

Abstract In this study, the sensing characteristics of tin oxide-based gas sensors deposit with different amounts of metalloporphyrin, which is a functionalization substance, are evaluated. The mass of metalloporphyrin deposited is 3, 10, 20, 30, and 40 mg for 5 different sensors prepared. The deposition of 3 mg of metalloporphyrin result in an island form of functionalization instead of a thin film; meanwhile, thin films with thicknesses of 25, 35, 74, and 92 nm are formed for the other four cases. As the deposition amount of metalloporphyrin increase, the performance of the sensor deteriorate. The samples are prepared by subdividing the amount of metalloporphyrin source to determine the optimized deposition amount. A sample is prepared with deposition amounts ranging between 1 to 10 mg. The sensors deposit with 3–5 mg metalloporphyrin has excellent response, response, and recovery time characteristics.

【 授权许可】

Unknown