MEMS Based Pressure Sensors – Linearity and Sensitivity Issues

Sensors & Transducers

M. M. Nayak¹  Jaspreet Singh²  K. Nagachenchaiah² 

[1] Liquid Propulsion System Centre (LPSC), ISRO, Dept. of Space, Bangalore, India;Semiconductor Laboratory(SCL), Dept. of Space, Punjab, India;

关键词: Pressure sensor;    Sensitivity;    Linearity;    Piezoresistance;    Wheatstone bridge;   

DOI  :  

来源: DOAJ

【 摘 要 】

This paper describes the various nonlinearities (NL) encountered in the Si-based Piezoresistive pressure sensors. The effect of various factors like diaphragm thickness, diaphragm curvature, position of the piezoresistors etc. is analyzed taking anisotropy into account. Also, the effect of modified bending stiffness due to presence of oxide/nitride used for isolation between metal and diaphragm is studied from linearity point of view.

【 授权许可】

Unknown