Mathematical Model of Pumping Gas Process by the Cylindrical Molecular Vacuum Pump in the Wide Range of Pressures

Nauka i Obrazovanie

K. E. Demikhov¹  A. A. Ochkov¹ 

[1] Bauman Moscow State Technical University;

关键词: mathematical model;    molecular vacuum pump;    optimization;    pumping speed;    software;    flowchart;   

DOI  :  10.7463/1214.0748304

来源: DOAJ

【 摘 要 】

Now the molecular vacuum pumps (MVP) are widely used in the modern industry. Upon analysis of vacuum engineering at the modern market it is possible to draw a conclusion that this equipment is one of the leaders among the high-vacuum pumping means, especially when using in combination with the axial steps of turbo-molecular vacuum pumps (TMP) containing compound flowing part.

This work describes a developed mathematical model (MM) of gas pumping process produced by cylindrical MVP operating in the wide range of pressures at the inlet. On the basis of developed MM the experimentally checked results are received. The error of calculation makes 5-6% that proves the adequacy of MM.

Based on the described MM the software is developed allowing us to calculate a construction of MVP working in the wide range of pressures. The flowchart for software is provided.

The developed software allows us to solve the relevant and, at the moment, yet unsolved to the end the problem of optimization of high-vacuum pumping means operating in the wide range of pressures at the inlet. After all, one of versions to solve this problem is to use the pumps with compound flowing part in which the molecular step (MVP) is mostly used.

【 授权许可】

Unknown