Self-Aligned Metal Electrodes in Fully Roll-to-Roll Processed Organic Transistors

Electronics

Kimmo Solehmainen¹  Elina Jansson²  Johanna Hiitola-Keinänen²  Marja Vilkman³  Teemu Ruotsalainen³ 

[1] VTT Technical Research Centre of Finland Ltd, Customer Solutions, Microkatu 1, FI-70211 Kuopio, Finland;VTT Technical Research Centre of Finland Ltd, Printed and Hybrid Functionalities, Kaitoväylä 1, FI-90590 Oulu, Finland;VTT Technical Research Centre of Finland Ltd, Printed and Hybrid Functionalities, Tietotie 3, FI-02150 Espoo, Finland;

关键词: roll-to-roll;    organic transistor;    self-alignment;    printing;    cost analysis;   

DOI  :  10.3390/electronics5010002

来源: DOAJ

【 摘 要 】

We demonstrate the production of organic bottom gate transistors with self-aligned electrodes, using only continuous roll-to-roll (R2R) techniques. The self-alignment allows accurate <5 µm layer-to-layer registration, which is usually a challenge in high-speed R2R environments as the standard registration methods are limited to the millimeter range—or, at best, to tens of µm if online cameras and automatic web control are utilized. The improved registration enables minimizing the overlap between the source/drain electrodes and the gate electrode, which is essential for minimizing the parasitic capacitance. The complete process is a combination of several techniques, including evaporation, reverse gravure, flexography, lift-off, UV exposure and development methods—all transferred to a continuous R2R pilot line. Altogether, approximately 80 meters of devices consisting of thousands of transistors were manufactured in a roll-to-roll fashion. Finally, a cost analysis is presented in order to ascertain the main costs and to predict whether the process would be feasible for the industrial production of organic transistors.

【 授权许可】

Unknown